Consistently Uniform Films
A major advantage of the sp3 hot-filament system is the ability to deposit a coating of very uniform thickness over a broad area. Precise control of the process parameters results in a ±10% variation in film thickness over the entire deposition area of more than 144 square inches (93,000 mm²). Run-to-run consistency is within ±20%.

By contrast, in microwave and arcjet reactors the deposition target is typically a chuck with a diameter of 6 or 8 inches (150 or 200 mm). The difference in thickness of the deposited film from the center of the chuck to a span of 5 or 7 inches (130 or 180 mm) is on the order of 3:1, resulting in a substantial variation in the coating thickness over a deposition area of under 50 square inches (32,000 mm²).

Uniformity within an insert or other cutting tool is also very important. Hot spots, as often found in microwave and arcjet reactors, can result in thickness variations of ±30%, corner to corner.

The Model 600's precise temperature control avoids hot spots by providing even energy distribution over each insert and across the entire load.

Hot Filament Film Uniformity vs. Arcjet and Microwave



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Hot Filament Reactors

Model 600 Diamond Deposition Reactor

Deposition Control

Diamond Film Uniformity

Specifications