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Reactor Specifications
General
Deposition rate 0.3 to 1.1 micron/hour (recipe and part geometry dependent)
Useful deposition area 140 square inches typical
Power consumption Approx. 35 kW plus vacuum pump
MTBF >500 hours
Run turn-around time <1 hour
Preventive maintenance downtime Approx. 2% for cleaning and pump maintenance
Unscheduled downtime <5%
Process Control, Model 600P
Gas cabinet configuration 4 MFC loops: CH4, 2 x H2, N2.
Gas flow rate Methane: 200 SCCM.
Hydrogen: high flow 5 SLM.
Hydrogen: low flow, 500 SCCM.
Nitrogen: 10 SLM.
Recipe control Up to 59 steps, AutoMode plus Manual Mode; real-time display of all parameters; datalogging of all exceptions to host supervisor; all parameters adjustable in each step.
Pressure control Downstream closed loop throttle valve.
Process Control, Model 600RD
Gas cabinet configuration 5 MFC loops: CH4, 2 x H2, N2, Ar.
Gas flow rate Methane: 200 SCCM.
Hydrogen: high flow 5 SLM.
Hydrogen: low flow, 100 SCCM.
Nitrogen: 10 SLM.
Argon: 5 SLM.
Recipe control Up to 59 steps, AutoMode plus Manual Mode; real-time display of all parameters; datalogging of all exceptions to host supervisor; all parameters adjustable in each step.
Pressure control Downstream closed loop throttle valve.
Host Supervisor
Included with first system Workstation can control up to four Model 600 Reactors. Provides system monitoring and control, data logging, and recipe development and storage.
Vacuum System (Optional)
Pump type Alcatel 2063 or equivalent.
Pump footprint 12 in. x 34 in.(30 cm x 86 cm).
Cycle time 30 minute pump-down; 10 minute vent.
Operating range 10 to 50 Torr.
Accuracy ±500 mTorr.
Leak test Software controlled, optional on every run.
Safety
Hardware interlocks Equipment and personnel protected from hazardous situations related to flammable gas, high voltages and high temperatures. (External flammable gas detector required.)
Software interlocks User-controlled through Alarm/Abort Levels on analog values and status of digital alarm inputs.
Facilities Requirement
Footprint 48 in. x 54 in. (117 cm x 132 cm)
Power input 480 VAC 3-phase, 4-wire, 70 Amp.
208 VAC 3-phase, 5-wire, 20 Amp.
Cooling water 10 gpm at 40 psi drop, 20°C maximum
Access 24 in.(60 cm) clearance, all sides.
Process gases H2, CH4, N2 and Ar.

Option Package for Planar Deposition
For use on flat tools and substrates which require coating on one planar surface.
Coating Performance Deposition area
Growth rate		 13" x 11" (33 cm x 28 cm).
0.3 to 1.0 µ/hr. ±20% (recipe dependent).
Coating Uniformity   ±10% over deposition area.
±20% run-to-run and insert-to-insert.
Acessories and consumables Included Two sets molybdenum filament array assemblies.
Filament array loading fixture.
One roll of tungsten filament wire.
Two insert support tray assemblies.
All required fasteners.
Spares Available with purchase of recommended spares package One of each style of molybdenum filament support.
Kit of molybdenum fastener spares.
Insert support screen.
Screen support bars.

Option Package for Three Dimensional Deposition
For substrates and appplications which require coating in more than one plane.
Coating Performance Deposition area
Target sizes
Growth rate		 13" x 11" (33 cm x 28 cm).
Up to 1 inch diameter and 2 inch coated length.
0.3 to 0.7 µ/hr. ±20%, recipe dependent.
Coating Uniformity For round cutting tools ±20% at tool tip.
±30% over length of flute or guaranteed length of cut (whichever is smaller).
Accessories and Consumables Included Two sets molybdenum filament array assemblies.
One roll of tungsten filament wire.
Filament array loading fixture.
All required fasteners.
Spares Available with purchase of recommended spares package One of each style of molybdenum filament support.
Kit of molybdenum fastener spares.

Option Package for Round cutting tools
Includes   Three dimensional package above plus complete fixturing set for coating endmills and drills.
Spares Available with purchase of recommended spares package Additional tool length compensation posts.

Warranty and Support
Warranty sp3 warrants the Model 600 Reactor and its components for one year after delivery.
Extended system support is available.
Support Processes, procedures, training, installation, and maintenance are all provided as part of the purchase of a Model 600 Reactor.


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Hot Filament Reactors

Model 600 Diamond Deposition Reactor

Deposition Control

Diamond Film Uniformity

Specifications
Model 600 shown with included Cell Supervisor
 
Up to four Model 600 Reactors can be controlled by one Cell Supervisor
 
Detachable panels and hinged doors allow easy access to all internal parts for fault diagnosis and repair