Microwave and Hot Filament Deposition
We manufacture Microwave CVD systems for R&D and production, and we are the worldwide distributor for sp3 Hot Filament CVD systems. Our systems are used for making diamond films, CNT and other advanced material applications for R&D and industrial diamond coating.

Worldwide Research and Industry Cooperation
Seki cooperates with researchers and industry, worldwide, to provide optimal solutions uitilizing the advantages of Microwave and Hot Filament technologies.

Systems for R&D and Production
Seki's Microwave CVD systems and sp3 Hot Filament CVD systems are your number one choice for research and production diamond coating. These systems offer high reliability, flexible advanced process capabilities, and low cost of ownership. We are proud of our reputation in providing Microwave CVD systems to support advanced diamond and carbon materials research in leading unversities and research institutions around the world.

Used in both R&D and production, the sp3 Hot Filament CVD system provides high quality, uniform diamond coatings for piece parts such as tools as well as large areas including 300mm wafers for electronics applications.


Read more about Microwave Plasma Reactors

Read more about Hot Filament Reactors

June 24, 2008
sp3 Diamond Technologies Receives Multiple Orders for Hot Filament CVD Diamond Deposition Tool

November 8 , 2007
sp3 Diamond Technologies Installs Advanced Diamond Deposition Tool at Heriot-Watt Universit

July 21, 2006
sp3 Diamond Technologies Provides Diamond-on-Silicon Process to MEMS Exchange

June 27, 2006
sp3 Diamond Technologies Awarded Phase II SBIR For 100mm GaN on Diamond Wafer Development

April 18, 2006
sp3 Introduces Advanced Diamond Deposition System

Upcoming Tradeshows


Diamond 2008 19th European Conference on Diamond
Details

More Tradeshows

Applications of our microwave and hot filament systems include:

• Single crystal diamond
• Carbon nanotubes
• Diamond films for MEMS

• Diamond substrates for electronics
• Electrodes for electrochemistry
• Thermal management

• Diamond windows
• Wear surfaces and seals
• Cutting tools