|
Microwave Plasma Applications
Model AX5000/AX5200
 The AX5000 / AX5200 incorporate process development for the growth of high quality CVD diamond films for application in electronics, optics, thermal management, and tools. The AX5000 deposits CVD diamond on 2-in diameter substrates with good thickness uniformity. Substrates up to 4-in diameter can be accommodated.
 |
 |
Raman spectrum of a CVD
diamond films
|
|
| |
|
|
|
Diamond membrane approximately 2 mm thick
(Membrane courtesy of Dr. H. Dishmann, BP America, Inc.)
|
^ Back to top |
