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Microwave Plasma Applications
Model AX5250/AX5400
The AX5400/AX5250 incorporate process development for the growth of highest quality CVD diamond films at very high growth rates. Uniform, free standing diamond materials for advanced applications are obtained.
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Raman spectrum of a CVD
diamond films
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SEM of a thick diamond film
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Examples of thick CVD diamond films
suitable for heat sink applications
(the larger wafer is 2 in. diameter)
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