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Microwave Plasma Applications
Model AX6550/AX6560
 AX6550/AX6560 are the reactors in a series that incorporates former ASTeX newest development in microwave reactor technology. The AX6550/AX6560 enable the user sufficient production capacity to capture a significant market share in the rapidly expanding thermal management and the highly competitive tool markets.
| Figure 1 shows silicon wafer in a 4-inch diameter loading platform. The AX6550/AX6560 is designed to provide clear and easy access to substrates, making loading and unloading a simple operation.This design also allows the straightforward implementation of robotics for loading operations. |
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Figure 1. A 4-inch diameter silicon wafer on the AX 6550 substrate stage. |
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| Figure 2 shows an example of a loading configuration for SPG422 inserts over a 4 inch diameter loading area. |
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Figure 2. SPG422 inserts in standard tool fixture on AX 6560 substrate stage. |
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| The AX6500 Series of reactors is designed to satisfy customer needs in all application areas for thin and thick diamond films. Specialized reactors are available or under development for each application area, including thermal management, tool inserts, optics, and electronics. |
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Figure 3. Examples of thick diamond films suitable for thermal management applications, as well as CVD diamond-coated wafers and tool inserts. |
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