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Microwave Plasma Applications
Advanced Materials
Seki microwave plasma CVD systems are now routinely used to deposit aligned carbon nanotubes (Figure 1), nanocrystalline diamond (Figure 2), and silicon carbonitride materials (Figure 3).
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| Figure 1. SEM micrograph showing aligned carbon nanotubes grown by microwave plasma assisted CVD (Courtesy of L. C. Chen, National Taiwan University K. H. Chen, Academia Sinica) |
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| Figure 2. Example of micro and nano-crystalline diamond films grown in AX5000 (Courtesy of T. Soga, Nagoya Institute of Technology) |
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| Figure 3. Silicon carbonitride (SixCyNx) crystals and aligned nano rods formed using microwave plasma. (Courtesy of L. C. Chen, National Taiwan University K. H.Chen, Academia Sinica) |
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