CVD-grown single crystal diamond. (Courtesy of Carnegie Institute, Washington)

Seki's unique, flexible reactor and patented microwave coupling design allow microwave processing at high pressure (>10 Torr), at medium pressure (100 mTorr with optional magnets), and at low pressure (<10 mTorr with optional magnet and optional streaming chamber).

SEM micrograph showing aligned carbon nanotubes grown by microwave plasma assisted CVD (Courtesy of L. C. Chen, National Taiwan University K. H. Chen, Academia Sinica)

These CVD systems are used worldwide to grow various materials which include Carbon and related materials (Diamond, nanocrystalline diamond and carbon nanotubes, etc.) and non-carbon advanced materials GaN, SiC, etc. with recent addition of Gallium Oxide and Silicon wiskers. In particular, exploiting the unique and valuable properties of diamond, Seki microwave plasma CVD reactors are used for tool coatings, thermal management, SAW devices, etc. and for various new applications based on nanocrystalline diamond.