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Model AX6550/6560
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| AX6500 8kw Semi-Production Model |
The AX6550 produces CVD diamond substrates suitable for most heat-spreading applications. Thick CVD diamond films, to over 2.5 inches in area, enable and expand applications such as laser diode mounts, multi-chip modules, surface acoustic wave devices, and high-power GaAs-based circuits. The AX6550 is designed for a production environment, with features including: easy loading, push-button operation, low maintenance, and high uptime. The AX6550's high deposition rates allow relatively short deposition runs which increase manufacturing flexibility and response time.
The AX6560 combines ASTeX's most advanced microwave reactor design and high growth rate diamond deposition processes into a turnkey system for pilot production of CVD diamond-coated tool inserts. The AX6560 is designed with the needs of the manufacturing environment in mind, including easy loading, push-button operation, low maintenance, and high uptime. In addition, the AX6560 is ideally suited for robotic tool handing in a production environment.
- Deposits CVD diamond films at growth rates and uniformity necessary for practical, cost effective tooling applications
- Enables pilot production of CVD diamond-coated tools
- Provides a path to full-scale production
- Includes proprietary process knowledge which significantly shorten the user's learning curve
- Easy to use
- Available with extensive after-sales service and support for high reliability and uptime
Options
- Optical Emission Spectrometer
- Remote Raman Spectrometer
- Additional Gas Channels
- Biasing capabilities
- Temperature Measurement System (In-situ nucleation monitoring)
- Turbo Pump
» View Model AX6550 Applications
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Model AX5000/5200 + AX6300 (ECR)
Model AX5250/AX5400 (5 kW)
Model AX6550/6560
Model AX6600
Model AX5010