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Model AX6600 High Power, for production
The AX6600 microwave plasma system is designed to operate with plasmas at high power densities for large area, high deposition rate processes to meet the scale-up needs of diamond coated tool insert manufacturers. This complete turnkey system incorporates the latest microwave technology with computer control for ease of use. A large batch size, covering an area of 8 inches in diameter, can be processed at one time. It is a highly flexible design which can be operated in a wide range of power from 35 kW to 100 kW.

In the year 2000, Seki Technotron delivered its first turnkey production system with 60 kW microwave powered plasma.

  • Large throughput
  • Easy to use
  • Production capability
  • Computer-controlled, turnkey operation
  • Reliable, stable reproducible,versatile operation
  • Extensive after-sales process support and training

 

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Microwave Plasma Products

Model AX5000/5200 + AX6300 (ECR)
AX5000 includes reactor assembly, power supply, circulator, dummy load and three-stub tuner. AX5200 system combines reactor with vacuum control and process gas supply.

Model AX5250/AX5400 (5 kW)
AX5250 reactor incorporates 5 kW at 2.45 GHz generator. AX5400 system combines reactor with vacuum control and process gas supply.

Model AX6550/6560
AX6550 features high diamond deposition growth rate and is desiged for a production environment. AX6560 is a turnkey system, suited for robotic tool handling.

Model AX6600
AX6600 is a turnkey system designed for rapid, large area deposition.

Model AX5010
AX5010 is a low-cost 1.5 kW deposition source for basic film research.